Compact and wafer-scale plasma-enhanced chemical vapour deposition (CVD) system for rapid synthesis of high-quality graphene.

Key features:

• Compact, benchtop design
• Wafer-scale synthesis: 3” or 4”
• 150 W/13.56 MHz RF power supply
• Multiple in-chamber plasma electrodes
• 1100 °C maximum platen temperature
• Cold-walled technology
• Fully-automatic control of critical conditions
• User-friendly, touchscreen interface
• Define/save multiple growth recipes
• PC connection for data-logging
• Equipped for easy servicing
• Comprehensive safety features
• Cleanroom compatible
• Implements proven nanoCVD technology

Technology:

Developed in collaboration with academic partners, nanoCVD technology is proven for the rapid throughput production of high-quality graphene for R&D applications via the well-established chemical vapour deposition (CVD) route that is considered most promising for future commercialisation of graphene-based technologies. Model nanoCVD-WGP is the result of the scaling of this technology to the wafer scale (3” or 4”), together with the addition of plasma-enhanced capability in a cold-walled chamber. While this represents a significant leap in the capabilities of the nanoCVD range, intelligent design means the compact nature of the units has been maintained for efficient location and integration.

Growth schemes:

Compatible with numerous CVD methods:

Substrates: Cu, Ni, etc. (films or foils)
Feedstocks: CH₄, C₂H₄, solids (PMMA), etc.
Process gases: H₂, Ar, N₂, etc.

Configuration:

Process chamber: Cold-walled, stainless steel with heat shielding. Pumping system: Turbomolecular pumping system; <5×10-7 mbar base pressure. Substrate stage: Up to 4" diameter. Up to 1100 °C with 1 °C control resolution. System operation: Touchscreen HMI and PC software. Manual or automatic control. Process gases: MFC controlled. Ar, CH₄ and H₂ as standard. Pressure control: Automatic. Plasma generation: 150 W/13.56 MHz RF power supply. Generation at substrate stage or remote electrodes. Safety features: Coolant and vacuum interlocks. Gas dilution modules.

Applications:

Pure research, product development and education in:

• Graphene & 2D materials
• Electrodes for photovoltaics
• Touchscreen displays
• High-performance electronics
• Biological, chemical and mechanical sensors
• Electrical energy storage