Compact, turn-key and scalable CVD system for high-throughput carbon nanotube synthesis. Proven performance.

The nanoCVD-8N provides precise control over conditions such as temperature and gas chemistry that are critical for reproducible production of surface-bound carbon nanotube (CNT) arrays, primarily the single-walled form. Developed in collaboration with leading academic partners, the units implement the cold-wall variant of the CVD method, enabling reduced contamination, low running costs and better control as compared to tube-furnace counterparts.

User operation is via a touchscreen HMI and is recipe-based, with all hardware being fully automated. Comprehensive safety features protect users and the system itself. Included PC software enables data-logging and offline recipe definition. All units come with expert support.

Systems are quick to install and ideal for research groups requiring ongoing rapid access to high-quality CNTs for R&D applications.

Depending on recipes and substrate/catalyst combinations, nanoCVD-8N units can create different CNT morphologies:

• Random: Multiply interconnected SWNTs
• Aligned: Parallel SWNTs
• ‘Forests’: Vertically stacked SWNTs

CNTS can be formed using a variety of substrates, such as SiO2/Si, Si3N4 and quartz, while typical catalysts include nanoparticles of Fe, Co and Ni. 

Key Features:

• Ultra-compact, benchtop, atmospheric-pressure CVD system
• Reproducible synthesis of high-quality carbon nanotubes
• Optimised for single-walled carbon nanotubes
• Precise control of conditions
• 1100 °C maximum temperature
• MFC-controlled process gases (argon, hydrogen and methane)
• 20 × 40 mm² maximum substrate size
• Process times <30 minutes
• Fully-automatic
• User-friendly, touchscreen interface
• Define/save multiple growth recipes
• PC connection for data-logging
• Equipped for easy servicing
• Comprehensive safety features
• Cleanroom compatible
• Proven performance 

Options:

The nanoCVD-8N is available with a rotary or scroll (dry) backing pump. 

Service Requirements:

The nanoCVD-8N requires inert service gas, high-purity process gases (argon, hydrogen and methane) and electrical power.