Mixed Injection System Liquid Vaporizer_MV-2000 Series

Horiba SKU: MV-2000
Mixed Injection System Liquid Vaporizer_MV-2000 Series-Nano Vacuum Australia and New Zealand

Mixed Injection System Liquid Vaporizer_MV-2000 Series

Horiba SKU: MV-2000
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MV-2000 Series

Mixed Injection System Liquid Vaporizer

The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

 

ADVANTAGE

  • Stable vaporization at low temperature using the new tornedo flow method
  • Higher flow rate vaporization (add the stability data)
  • Can vaporize a liquid source which is pyrolyzed easily

 

APPLICATION

  • Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
  • Optical Fiber Manufacturing Process in Electrical Equipment

 

 

SPECIFICATION

 

Model MV-2000
Liquid Material All liquids except those corrosive to stainless steel(ex. HCl, HF)
Setting Temperature By vaporization conditions(Control Valve : Max 140 ˚C Vaporizer : Max 200 ˚C)
Leak Integrity ≤ 1 × 10-8 Pa·m3 /s (He)
Internal leak standard ≤ 1 × 10-6 Pa·m3 /s (He)
Wetted parts SUS316L , PFA
Temperature Sensor Thermocouple type K (CA)
Pressure Resistance 1MPa (G)
Standard Fitting Liquid inlet: 1/8 VCR type Male Carrier gas inlet: 1/4 VCR type Female Gas outlet: 1/2 VCR type Male
Operating Temperature 15 - 50 ˚C
Option Air valve(Internal leak standard: ≤ 1×10-9 Pa · m3 / s(He) )

 

  • The generated flow rate may differ depending on the liquid material, amount of generation, generation conditions, etc. We will recommend the model most suited to your needs upon consultation.
  • The vaporizer has a heater, temperature sensor, and switch inside of it.

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