Mass Flow Controller/Meter SEC-N100 Series-Rubber and Metal Seal
Mass Flow Control
The SEC-N100 Series of mass flow controllers is designed for use in a wide range of applications ranging from the controlled delivery of process gases for solar cell manufacturing to high accuracy bench-top gas blending. The experience and expertise in the measurement and control of gases for all applications is reflected in the development of industry-leading-edge SEC-N100 Series which is available in with digital/analog, DeviceNet™, CC-Link™, and PROFIBUS™ communication as well as a variety of fittings, sizes and flow rate control ranges. SEC-N100 Series is suitable for a wide variety of applications where gas control is required.
MULTIPLE CONFIGURATION OPTIONS
- Communication options: digital/analog, DeviceNet™, CC-Link™, and PROFIBUS™
- Fitting-to-fitting dimensions: 124 mm – and 106 mm
- The flow rate control: 10 SCCM to 1000 SLM
- Seal options: Rubber and Metal
- Power supply: +/- 15 V
ADVANTAGES
- High accuracy
- High-speed response throughout the flow rate range
- Multi-range, multi-gas solution