Mass Flow Controller/Meter S48-Analog Metal Seal

Brand: Horiba

Product Code: S48-4CR-15V-10SCCM

Availability:Out of stock

Available Options

Mass Flow Control

S48 and S600 are wide variety of products for hybrid mass flow control in the form of controllers and meters. All the mass flow control products offer high accuracy and a fast response time. The range of gas flow controllers includes two types of sensors, pressure differential type and thermal type and various communication protocols; analogue, digital, DeviceNet™, PROFIBUS® and EtherCAT®. Choose between the high precision piezo stack valve or the more traditional solenoid valve to control process gas. All metal seal or Viton™ seal are available depending on gas or liquid compatibility requirements. Ultra wide range devices with a turndown ration of 1000:1 are available.

Multi gas (where the user can program the gas type) and multi range (where the user can configure the flow range) are available for when you need flexibility.


  • Communication options: Analog, Digital (RS484) and PROFIBUS
  • Power supply options: +/- 15 V and +/- 24 V
  • Seal options: Rubber and Metal



  • PV: Process gases for Diffusion/ PECVD/ Ion implanter
  • Fiber: Burner gases for MCVD/ VAD/ OVD process
  • Bioreactor/Pharmaceutical
  • Food & Bevarage
  • Furnaces
  • Vacuum coating
  • Analytical/ Gas analyzers
  • Automotive
  • Heat treatment



  • Convenient  Installation at any angle
  • Fine  linearity, muti-segment linear compensation
  • Fast  Response
  • The service life of solenoid valve: ≥100 million times
  • Low  Zero  Drift, effective suppression of  the zero drift
  • Good  Selectivity

    SPECIFICATION (S48 32/HMT: Low flow)

    No. Item S48 32/HMT- Low flow
    1 Full-scale flow rate (1,2,3,5,10)L/min
    2 Valve type Solenoid
    3 Valve rest position Normal close
    4 Mounting orientation Free
    5 Flow rate control range 2%~100%
    6 Flow rate measuring range 0~100%
    7  Response time 2s(T98, set value's±2%F.S.)
    8 Operation temperature  5~50℃
    9 Accuracy guaranteed
     temperature range 
    10 Accuracy ±1.0%F.S
    11 Linearity ±0.5%F.S
    12 Repeatability ±0.2%F.S
    13 Differential pressure ~5L/min:(0.05~0.3)MPa
    14 Pressure resistance 3MPa
    15 Leak Integrity 1×10-8Pa.m3/s(He)
    16 Wetted materials 316L,PTFE,Viton
    17 Fittings Swagelok:1/4″,Φ6mm,Φ10mm
    VCR: 1/4″,3/8″
    18 Power supply

    +15V, <100mA;
    -15V, <150mA

    +24VDC(Wide voltage +11~+25V),
    <250mA(When +24VDC powered)

    19 Flow rate setting signal

    (0-5)VDC  Input impedance>1MΩ

    (Can be customized:

    20 Flow rate output signal (0-5) VDC  Load output current capability ≤3mA
    21 Electrical connector D-SUB15, D-SUB9
    22 Weight(kg) 0.9 kg




     4IS 1/4 inch Swagelok (127 mm)
    4CR 1/4 inch  VCR (124 mm)