Mass Flow Controller/Meter S48-Analog Elastomer Seal
Mass Flow Control
S48 and S600 are wide variety of products for hybrid mass flow control in the form of controllers and meters. All the mass flow control products offer high accuracy and a fast response time. The range of gas flow controllers includes two types of sensors, pressure differential type and thermal type and various communication protocols; analogue, digital, DeviceNet™, PROFIBUS® and EtherCAT®. Choose between the high precision piezo stack valve or the more traditional solenoid valve to control process gas. All metal seal or Viton™ seal are available depending on gas or liquid compatibility requirements. Ultra wide range devices with a turndown ration of 1000:1 are available.
Multi gas (where the user can program the gas type) and multi range (where the user can configure the flow range) are available for when you need flexibility.
MULTIPLE CONFIGURATION OPTIONS
- Communication options: Analog, Digital (RS484) and PROFIBUS
- Power supply options: +/- 15 V and +/- 24 V
- Seal options: Rubber and Metal
APPLICATION
- PV: Process gases for Diffusion/ PECVD/ Ion implanter
- Fiber: Burner gases for MCVD/ VAD/ OVD process
- Bioreactor/Pharmaceutical
- Food & Bevarage
- Furnaces
- Vacuum coating
- Analytical/ Gas analyzers
- Automotive
- Heat treatment
ADVANTAGE
- Convenient Installation at any angle
- Fine linearity, muti-segment linear compensation
- Fast Response
- The service life of solenoid valve: ≥100 million times
- Low Zero Drift, effective suppression of the zero drift
- Good Selectivity
SPECIFICATION (S48 32/HMT: Low flow & S48 28/HMT: High flow)
S48 32/HMT
| No. | Item | S48 32/HMT- Low flow | |
| 1 | Full-scale flow rate | (1,2,3,5,10)L/min | |
| 2 | Valve type | Solenoid | |
| 3 | Valve rest position | Normal close | |
| 4 | Mounting orientation | Free | |
| 5 | Flow rate control range | 2%~100% | |
| 6 | Flow rate measuring range | 0~100% | |
| 7 | Response time | 2s(T98, set value's±2%F.S.) | |
| 8 | Operation temperature | 5~50℃ | |
| 9 | Accuracy guaranteed temperature range |
15~35℃ | |
| 10 | Accuracy | ±1.0%F.S | |
| 11 | Linearity | ±0.5%F.S | |
| 12 | Repeatability | ±0.2%F.S | |
| 13 | Differential pressure |
~5L/min:(0.05~0.3)MPa 5L/min~10L/min:(0.1~0.3)MPa 30L/min~50L/min:(0.15~0.3)MPa |
|
| 14 | Pressure resistance | 3MPa | |
| 15 | Leak Integrity | 1×10-8Pa.m3/s(He) | |
| 16 | Wetted materials | 316L,PTFE,Viton | |
| 17 | Fittings |
Swagelok:1/4″,Φ6mm,Φ10mm VCR: 1/4″,3/8″ |
|
| 18 | Power supply |
+15V, <100mA; +24VDC(Wide voltage +11~+25V), |
|
| 19 | Flow rate setting signal |
(0-5)VDC Input impedance>1MΩ 4~20mA； |
|
| 20 | Flow rate output signal | (0-5) VDC Load output current capability ≤3mA | |
| 21 | Electrical connector | D-SUB15, D-SUB9 | |
| 22 | Weight(kg) | 0.9 kg | |
S48 28/HMT
| No. | Item | S48 28/HMT- High flow | |||
| 1 | Full-scale flow rate | (100,150,200)L/min | |||
| 2 | Valve type | Solenoid | |||
| 3 | Valve rest position | Normal close | |||
| 4 | Mounting orientation | Free | |||
| 5 | Flow rate control range | 5%~100% | |||
| 6 | Flow rate measuring range | 0~100% | |||
| 7 | Response time | 2s(T98, set value's±2%F.S.) | |||
| 8 | Operation temperature | 5~50℃ | |||
| 9 | Accuracy guaranteed temperature range |
15~35℃ | |||
| 10 | Accuracy | ±1.0%F.S | |||
| 11 | Linearity | ±0.5%F.S | |||
| 12 | Repeatability | ±0.2%F.S | |||
| 13 | Differential pressure |
|
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| 14 | Pressure resistance | 3MPa | |||
| 15 | Leak Integrity | 1×10-8Pa.m3/s(He) | |||
| 16 | Wetted materials | 316L,PTFE,Viton | |||
| 17 | Fittings | Swagelok:3/8″, Φ10mm, VCR:1/2″ | |||
| 18 | Power supply |
±15VDC(±5%) +24VDC(Wide voltage +11~+25V), |
|||
| 19 | Flow rate setting signal |
(0-5)VDC Input impedance>1MΩ 4~20mA； |
|||
| 20 | Flow rate output signal | (0-5) VDC Load output current capability ≤3mA | |||
| 21 | Electrical connector | D-SUB15, D-SUB9 | |||
| 22 | Weight(kg) | 2.8 kg | |||
FITTING DESCRIPTION
| 4IS | 1/4 inch Swagelok (127 mm) |
| 4CR | 1/4 inch VCR (124 mm) |
| 6MS | 6 mm Swagelok (127 mm) |
| 6IS | 3/8 inch Swagelok (181 mm) |
| 10MS | 10 mm Swagelok (181 mm) |
