Brand: Prevac

Product Code: MS2 63C1

Availability:Out of stock

New equipment for sputter deposition application

Magnetron Source MS2 63C1

  • Magnetron flange: DN 63 VF
  • In situ tilt module: +45°÷ -10°
  • Target diameter: 2”
  • Pneumatic dome type shutter
  • Chimney as standard

DC Power Supply M600DC-PS

  • Switch for 3 magnetron sources with shutters control
  • Power: 600W. Easy to extend power up to 1200W/1800W/2400W


Support for:

  • Thickness and evaporation rate measurements
  • Vacuum measurements
  • Mass flow controller

Download brochure here