Ion Source IS 40C1 For Sample Cleaning

Brand: Prevac

Product Code: IS40C1

Availability: On Request

The Ion Source IS 40C1 is a compact, easy-to-use extractor type ion gun for sample surface cleaning.

The source generates an ion current of >70 μA/cm2 (Argon) with Gaussian beam profile. The source insertion length is adaptable to individual requirements (between 62.5 mm - 384.5 mm, other on request).


  • Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
  • High Ion Beam Current
  • Long lifetime
  • High stability


  • Gas dosing system
  • Customised insertion length
  • Linear shift

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          Technical data

          Mounting flange DN 40CF  (non-rotatable)
          Energy range 0.12 keV – 5 keV 
          Current density > 120 μA/cm2 (for distance 30 mm)
          Cathode type yttrium oxide coated iridium filament
          Insertion length min. 62.5 mm, other on request
          OD: max. 37 mm
          FWHM dependent on ion energy and working distance 
          (e.g. 3 mm for distance 30 mm)
          Typical working distance 30 - 250 mm
          Bakeout temperature up to 250°C
          Working pressure 10-5 - 10-6 mbar