HF/HCl/NH3 Concentration Monitor_HF-960M
HF-960M
Low Concentration Type HF/HCl/NH3 Concentration Monitor
The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, high-speed measurement of low concentrations of hydrofluoric acid, hydrochloric acid and ammonia, and is thus perfect for single-bath and wafer cleaning. The HF-960M is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB.
ADVANTAGE
- Precise measurement of low HF concentrations
- 5 types of measurement available
HF, HCl & NH3 concentrations, conductivity, and temperature - The analog output range can be arbitrarily set with to the concentration measuring range
- The HF-960M provides 7 output points
- 3-channel transmission output
- RoHS compliant
- DC 24 V Power Source
- CE Marking compliant
SPECIFICATION
|
Product name |
Low Concentration Type HF / HCl / NH3 Concentration Monitor |
|---|---|
|
Model |
HF-960M |
| Measurement range | HF: 0-5000 ppm, HCl: 0-5000 ppm, NH3: 0-10000 ppm, Conductivity:0-50.0 mS/cm |
|
Power supply |
Rated voltage 24 V DC, 10 W (max) |
|
Structure |
Iindoor-use, panel installation type, panel case : ABS, terminal : PBT, Panel : IP65 dust and water proof structure |
|
External dimensions |
96 (W) x 96 (H) x 115 (D) mm, Case depth : approx.105 (when panel-mounted) |
|
Weight |
Approx. 550 g |
|
Conforming standards |
CE marking, FCC Part15 |
|
Compatible sensors |
FS-10F series flow-type sensor |
APPLICATION
Semiconductor BEOL CMP in Semiconductor Manufacturing Process
