HF/HCl/NH3 Concentration Monitor_HF-960M

Horiba SKU: HF-960M
HF/HCl/NH3 Concentration Monitor_HF-960M-Nano Vacuum Australia and New Zealand

HF/HCl/NH3 Concentration Monitor_HF-960M

Horiba SKU: HF-960M
Your inquiry was submitted successfully. You can expect to hear from us shortly.


Low Concentration Type HF/HCl/NH3 Concentration Monitor

The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, high-speed measurement of low concentrations of hydrofluoric acid, hydrochloric acid and ammonia, and is thus perfect for single-bath and wafer cleaning. The HF-960M is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB.




  • Precise measurement of low HF concentrations
  • 5 types of measurement available
    HF, HCl & NH3 concentrations, conductivity, and temperature
  • The analog output range can be arbitrarily set with to the concentration measuring range
  • The HF-960M provides 7 output points
  • 3-channel transmission output
  • RoHS compliant
  • DC 24 V Power Source
  • CE Marking compliant




Product name

Low Concentration Type HF / HCl / NH3 Concentration Monitor



Measurement range HF: 0-5000 ppm, HCl: 0-5000 ppm, NH3: 0-10000 ppm, Conductivity:0-50.0 mS/cm

Power supply

Rated voltage 24 V DC, 10 W (max)


Iindoor-use, panel installation type, panel case : ABS, terminal : PBT, Panel : IP65 dust and water proof structure

External dimensions

96 (W) x 96 (H) x 115 (D) mm, Case depth : approx.105 (when panel-mounted)


Approx. 550 g

Conforming standards

CE marking, FCC Part15

Compatible sensors

FS-10F series flow-type sensor




Semiconductor BEOL CMP in Semiconductor Manufacturing Process

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

You may also like

More from Horiba

Recently viewed