Direct Liquid Injection System_VC Series

Horiba SKU: VC
Direct Liquid Injection System_VC Series-Nano Vacuum Australia and New Zealand

Direct Liquid Injection System_VC Series

Horiba SKU: VC
Your inquiry was submitted successfully. You can expect to hear from us shortly.

VC Series

Direct Liquid Injection System

The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.

Custom-made vaporization system consisting of this VC Series can be provided.



  • Compact size
  • Can be installed in a variety of positions
  • Best-selling TEOS vaporization system models
  • Combines SEF or LF, and digital control is possible
  • No need for a special bubbling tank or vaporization tank
  • Line-up of DeviceNetTM model
  • RoHS Compliance




  • Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
  • Liquid Source Vaporization and Supply in Research and Testing Laboratories






Flow rate generated*1 

(During TEOS generation)

Max. 5.0 CCM conversion (liquid phase conversion)


Liquids supported

 TEOS, P(OCH3)3, C6F6

Temperature rise

 Max. 150°C

Pressure generated*1

 Reduced pressure

External leak integrity


Internal Leak Integrity


Wetted mateliar

316L Stainless Steel ( polished surface )

Internal heater volume

 AC 100V to 120V 70W(35Wx2)

Temperature sensor used

Thermocouple K type (CA)

Pressure Resistance


Standard Fitting

 Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female


*1 Varies depending on the type of liquid

*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa)

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

You may also like

More from Horiba

Recently viewed