Direct Liquid Injection System_VC Series

Brand: Horiba

Product Code: VC

Availability:Out of stock

VC Series

Direct Liquid Injection System

The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.

Custom-made vaporization system consisting of this VC Series can be provided.

 

ADVANTAGE

  • Compact size
  • Can be installed in a variety of positions
  • Best-selling TEOS vaporization system models
  • Combines SEF or LF, and digital control is possible
  • No need for a special bubbling tank or vaporization tank
  • Line-up of DeviceNetTM model
  • RoHS Compliance

 

 

APPLICATION

  • Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
  • Liquid Source Vaporization and Supply in Research and Testing Laboratories


 

SPECIFICATION

Model

VC-1420

 

Flow rate generated*1 

(During TEOS generation)

Max. 5.0 CCM conversion (liquid phase conversion)

 

Liquids supported

 TEOS, P(OCH3)3, C6F6

Temperature rise

 Max. 150°C

Pressure generated*1

 Reduced pressure

External leak integrity

 1.0x10-8Pa·m3/s

Internal Leak Integrity

 1.0x10-6Pa·m3/s

Wetted mateliar

316L Stainless Steel ( polished surface )

Internal heater volume

 AC 100V to 120V 70W(35Wx2)

Temperature sensor used

Thermocouple K type (CA)

Pressure Resistance

 1.0MPa(G)

Standard Fitting

 Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female

 

*1 Varies depending on the type of liquid

*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa)