Deposition Cluster Tool

Brand: Prevac

Product Code: MBE

Availability:Out of stock

Multi-chamber MBE system

MBE multi-chamber system for metallic multi-layers from magnetic materials. Features in-situ characterisation of sample magnetic properties, topography and crystallography.


  • MBE chamber
  • Radial distribution chamber
  • Preparation chamber with LEED optics and both direct and e-beam heating
  • Preparation chamber with high energy ion source for sample etching, preparation and structure modification
  • MOKE characterisation chamber, for in-situ Kerr effect measurements
  • Integrated SPM chamber with additional tip and sample loading system
  • Additional chambers for sample introduction and storage


  • 10-11 mbar vacuum level
  • Semi-automatic transfer of 3″ sample holders and smaller samples
  • 1400°C Heating of 3″ sample holders in MBE chamber
  • 1700°C EB heating of smaller holders in the preparation chamber
  • MBE E-guns with closed loop control by RGA
  • Full software control of the MBE process
  • Ion assist prep chamber with 25kV ion source with differential pumping
  • Low vibration design of the system, especially for SPM and MOKE
  • Independent intro for tips and samples for SPM
  • UHV Kerr effect analysis chamber
  • All process chambers with thermocouple and pyrometer temperature control
  • LCD visualisation of complete system status

 Download brochure here