MICROPOLE System

Compact Process Gas Monitor

The MICROPOLE system is one of the smallest complete mass spectrometer systems. The compact size is achieved using a patented array design of miniature quadrupole mass filters. The array offers similar or greater sensitivity than conventional mass spectrometers but using just a fraction of the volume. This gas monitor system is capable of operating at much higher pressures than traditional systems, so the need for additional differential pumping equipment is reduced.

The sensors are factory pre-tuned and calibrated against transfer standards to allow direct interchangeability by the user without the need for technical expertise to calibrate.

ADVANTAGE

• Extremely compact size and lightweight
• High performance
• High pressure operation
• Interchangeable sensor head in calibration
• Network sensors
• User friendly software
• Monitor controller
  
  

Measurement principle

The Gas Monitor consists of an ion source, a mass spectrometer, and a measurement section. The residual gas is ionized when it collides with the thermoelectrons discharged from the high-temperature filament, and the ions that are thereby created accelerate and converge onto the mass spectrometer. At the mass spectrometer, direct and alternating current voltages are applied to the four cylindrical electrodes (quadropoles), which allows the ions to be separated by mass. The separated ions are detected as electric current by the Faraday cup. The ion current is proportional to the mass (partial pressure) of the residual gas.

MICROPOLE^TM Analyzer

The feature that makes the MICROPOLE^TM System unique is the MICROPOLE^TM Analyzer (MPA); a grouping of nine quadropoles that takes full advantage of ultraprecision optical etching processing technology and glass/metal joint technology. The development of the MPA has enabled the creation of the world's smallest residual gas analyzer, while offering the same or better sensitivity as conventional, larger mass spectrometers. The analyzer is a plug-in unit. It features a sensor unit that has already been calibrated for partial pressures, and offers absolute total and partial pressure measurement.

APPLICATION

• Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
• Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing

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Download Technical Notes here