Scanner |
Scanning field |
High voltage regime: 100x100x12 um Low voltage regime: 3x3x3 um |
Scanner type |
Metrological piezotube XYZ scanner with sensors |
Sensors type |
XYZ – ultrafast capacitance sensors |
Sensors noise |
Low noise XY sensor: <0.3 nm Metrological Z sensor: <0.03 nm |
Sensors linearity |
Metrological XY sensor: <0.1% Metrological Z sensor: <0.1% |
Overall scanner parameters |
100x100x12 um with CL Resolution: XY - 0.3 nm, Z - 0.03 nm Linearity: XY - <0.1%, Z - <0.1% 3x3x3 um with OL. Resolution: XY - 0.05 nm, Z - 0.01 nm |
Sample |
Sample positioning range |
12 mm |
Sample positioning resolution |
1.5 um |
Sample dimension |
up to 1,5” X 1,5” X 1/2”, 35x35x12 mm |
Sample weight |
up to 100 g |
Approach system type |
Z – Stepper Motor |
Approach system step size |
230 nm |
Approach system speed rate |
10 mm per min |
Algorithm Gentle approach |
Available (probe guaranteed to stop before it touches the sample) |
Scanning Heads |
AFM head for Si cantilever |
Available. All commercial cantilevers can be used |
Type of cantilever detection |
Laser/Detector Alignment |
Probe holders |
Probe holder for air measurements. Probe holder for liquid measurements. |
Type of AFM head mounting |
Cinematically mount. Mount accuracy 150 nm (Remove/mount accuracy) |
STM AFM head for wire probes |
Available. Tungsten wire for AFM measurement. (low cost experiments) Pt|Ir wire for STM measurements |
Type of cantilever detection |
Piezo for AFM measurement |
Probe holders |
Probe holder for air and liquid measurements |
Controllers. Digital professional controller |
Number of images can be acquired during one scanning cycle |
Up to 16 |
Image size |
Up to 8Kx8K scan size |
ADC |
500 kHz 16-bit ADC 12 channels (5 channels with software controlling gain amplifiers 1,10,100,1000) Individual filter on each channel |
DSP |
Floating point 320 MHz DSP |
Digital FB |
Yes 6 Channels |
DACs: |
4 composite DACs (3x16bit) for X,Y,Z, Bias Voltage 2 16-bit DAC for user output |
XYZ scanner control voltage |
High-voltage outputs: X, -X, Y, -Y, Z, -Z at -150 V to +150 V Low-voltage mode XY ± 10 V |
XY RMS noise in 1000 Hz bandwidth |
0.3 ppm RMS |
Z RMS noise in 1000 Hz bandwidth |
0.3 ppm RMS |
XY bandwidth |
4 kHz (LV regime – 10 kHz) |
Z bandwidth |
9 kHz |
Maximal current of XY amplifiers |
1.5 mA |
Maximal current of Z amplifiers |
8 mA |
Integrated demodulator for X,Y,Z capacitive capacitance sensors |
Yes |
Open/Closed-loop mode for X,Y controlх |
Yes |
Generator frequency setting range |
DC – 5 MHz |
Deflection registration channel bandwidth |
170 Hz - 5 MHz |
Lateral Force registration channel bandwidth |
170 Hz - 5 MHz |
2 additional registration channel bandwidth |
170 Hz - 5 MHz |
Bias Voltage |
± 10 V bandwidth 0 – 5 MHz |
Modulating signals supply |
To the probe (external output); High-voltage X,Y, Z channels (including LV regime); Bias Voltage |
Number of generators for modulation, user accessible |
2, 0-5 MHz, 0.1 Hz resolution |
Stepper motor control outputs |
Two 16-bit DACs, 20 V peak-to-peak, max current 130 mA |
Additional digital inputs/ outputs |
6 |
Additional digital outputs |
1 |
I2C bus |
Yes |
|
Macro language |
Max. cable length between the controller and SPM base or measuring heads |
2 m |
Computer interface |
USB 2.0 |
Voltage supply |
110/220 V |
Power consumption |
≤ 110 W |