NEW MAGNETRON SPUTTER SET
by Ava Faridi
Prevac is promoting a NEW MAGNETRON SPUTTER SET
New equipment for sputter deposition application
Magnetron Source MS2 63C1
• Magnetron flange: DN 63 VF
• In situ tilt module: +45°÷ -10°
• Target diameter: 2”
• Pneumatic dome type shutter
• Chimney as standard
DC Power Supply M600DC-PS
• Switch for 3 magnetron sources with shutters control
• Power: 600W. Easy to extend power up to 1200W/1800W/2400W
Support for:
• Thickness and evaporation rate measurements
• Vacuum measurements • Mass flow controller
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