NEW MAGNETRON SPUTTER SET

Prevac is promoting a NEW MAGNETRON SPUTTER SET

New equipment for sputter deposition application

Magnetron Source MS2 63C1

• Magnetron flange: DN 63 VF

• In situ tilt module: +45°÷ -10°

• Target diameter: 2”

• Pneumatic dome type shutter

• Chimney as standard

DC Power Supply M600DC-PS

• Switch for 3 magnetron sources with shutters control

• Power: 600W. Easy to extend power up to 1200W/1800W/2400W

Support for:

• Thickness and evaporation rate measurements

• Vacuum measurements • Mass flow controller