High Vacuum Sputtering System

by Ava Faridi

PREVAC is promoting Advanced solutions for High Vacuum Sputtering Deposition process



  • Versatile, easy to extend with other deposition and analytical techniques
  • Ideally suited for deposition metal and dielectric thin film in both, sputter-up and sputter-down arrangement. Operated in DC, RF and Pulsed DC modes
  • A modular, user friendly approach to the system design means that the entire system can be easily reconfigured by changing the universal mounting flanges 
  • A wide rangeof substrate holders size and shape 
  • Intro chamber for fast and easy loading of substrate holder. Glovebox available


Contact Nano Vacuum Australia & New Zealand at: info@nanovactech.com to discuss about your deposition process.  

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